N-plane sapphire wafers are not as common as C-plane (0001), A-plane (11-20) or R-plane (1-102) wafers. Research shows that for AlN grown on A-plane(11-20) sapphire, the N-plane(11-23) epitaxial relationship between AlN and sapphire changed with nitridation temperature in the initial stage of growth, but it remained constant for AlN grown on N-plane sapphire.
Other films, such as ZnTe epilayers can be grown on N-plane (11-23) sapphire wafers by molecular beam epitaxy.
| Item | 2-inch N-plane(11-23) 430μm Sapphire Wafers | |
| Crystal Materials | 99,999%, High Purity, Monocrystalline Al2O3 | |
| Grade | Prime, Epi-Ready | |
| Surface Orientation | N-plane(11-23) | |
| Diameter | 50.8 mm +/- 0.1 mm | |
| Thickness | 430 μm +/- 25 μm | |
| Primary Flat Orientation | A-plane(11-20) +/- 0.2° | |
| Primary Flat Length | 16.0 mm +/- 1.0 mm | |
| Single Side Polished | Front Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
| (SSP) | Back Surface | Fine ground, Ra = 0.8 μm to 1.2 μm |
| Double Side Polished | Front Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
| (DSP) | Back Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
| TTV | < 10 μm | |
| BOW | < 10 μm | |
| WARP | < 10 μm | |
| Cleaning / Packaging | Class 100 cleanroom cleaning and vacuum packaging, | |
| 25 pieces in one cassette packaging or single piece packaging. | ||
Note: Custom sapphire substrates and wafers with any orientation and any thickness can be provided.
An Introduction to Silicon on Sapphire Technology
Coating and Metal Coating of Sapphire Windows
Introduction to the Manufacturing Process of Sapphire Ingot
