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M-Plane (10-10) Sapphire Wafers

M-Plane (10-10) Sapphire Wafers

Due to its application prospects in solar-blind ultraviolet detection, MgZnO alloy semiconductor films with suitable band gaps have attracted more and more attention. A series of MgxZn1-xO thin films with different compositions were prepared on M plane sapphire wafers by using low-pressure metalorganic chemical vapor deposition (LP-MOCVD).

CRYSCORE provides M-plane (10-10) sapphire wafers with excellent surface quality. The roughness on the epi-polished side is lower than 0.5 nm.

M-Plane (10-10) Sapphire Wafers M-Plane (10-10) Sapphire Wafers
Specifications of M-Plane (10-10) Sapphire Wafers

No matter you are looking for double or single side polished sapphire wafers, contact us and we'll suggest the choicest one for your business. 

Item

2-inch M-plane(10-10) 430μm Sapphire Wafers

Crystal Materials

99,999%, High Purity, Monocrystalline Al2O3

Grade

Prime, Epi-Ready

Surface Orientation

M-plane(10-10)

Diameter

50.8 mm +/- 0.1 mm

Thickness

430 μm +/- 25 μm

Primary Flat Orientation

C-plane(0001) +/- 0.2°

Primary Flat Length

16.0 mm +/- 1.0 mm

Single Side Polished

(SSP)

Front Surface

Epi-polished, Ra < 0.5 nm (by AFM)

Back Surface

Fine ground, Ra = 0.8 μm to 1.2 μm

Double Side Polished

(DSP)

Front Surface

Epi-polished, Ra < 0.5 nm (by AFM)

Back Surface

Epi-polished, Ra < 0.5 nm (by AFM)

TTV

< 10 μm

BOW

< 10 μm

WARP

< 10 μm

Cleaning / Packaging

Class 100 cleanroom cleaning and vacuum packaging,

25 pieces in one cassette packaging or single piece packaging.

Note: Custom sapphire wafers with any orientation and any thickness can be provided.


Our sapphire wafer cost you less and help you to achieve more, contact us to get more information.

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