4 Inch Patterned Sapphire Substrates

4 Inch Patterned Sapphire Substrates

Patterned Sapphire Substrates (PSS) is a micro-patterned sapphire substrate used for GaN-based light-emitting diodes(LEDs). PSS with small structures greatly improves the light extraction efficiency of finished devices. PSS also solves critical problems such as crystal dislocations and refractive index mismatch.

There are two different manufacturing processes to fabricate PSS in the industry, dry plasma etching and wet chemical etching. Today, the majority of PSS products are produced by dry plasma etching due to its inherently effective control of precision and uniformity.

4 Inch Patterned Sapphire Substrates 4-inch-patterned-sapphire-substrates
Specifications of 4 Inch Patterned Sapphire Substrates

Item4-inch C-plane(0001) 650μm Pattern Sapphire Substrate
Crystal Materials99,999%, High Purity, Monocrystalline Al2O3
GradePrime, Epi-Ready
Surface OrientationC-plane(0001)
Diameter100.0 mm +/- 0.1 mm
Thickness650 μm +/- 25 μm
Primary Flat OrientationA-plane(11-20) +/- 0.2°
Primary Flat Length30.0 mm +/- 1.0 mm
Pattern SpecificationDiameter: 2.7 +/- 0.1 μm;  Spacing: 0.3 +/- 0.1 μm;  Depth: 1.7 +/- 0.15 μm
Front SurfaceEpitaxial ready
Back SurfaceFine ground, Ra = 0.8 μm to 1.2 μm
Laser MarkingFront side or Back side
TTV< 20 μm
BOW< 20 μm
WARP< 20 μm
Cleaning / PackagingClass 100 cleanroom cleaning and vacuum packaging,
25 pieces in one cassette packaging or single piece packaging.

CRYSCORE offers high-quality patterned sapphire substrates, and we have customized solutions for you, get in touch with us now!

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