2 Inch Patterned Sapphire Substrates

2 Inch Patterned Sapphire Substrates

PSS is to design and manufacture specific nano-scale microstructure pattern on the sapphire substrate, in the way of growth and etching, to control the form of LED light output (the concave and convex pattern on the sapphire substrate will produce a light scattering or refraction effect to increase the extraction rate of light).

Meanwhile, GaN thin film growing on the patterned sapphire substrate will produce the effect of lateral epitaxial, reduce the gap defects between GaN and sapphire substrate, improve the quality of epitaxy, and promote the LED inside quantum efficiency and increase light-extraction efficiency.

2 Inch Patterned Sapphire Substrates 2 Inch Patterned Sapphire Substrates
Specifications of 2 Inch Patterned Sapphire Substrates

Item2-inch C-plane(0001) 430μm Pattern Sapphire Substrate
Crystal Materials99,999%, High Purity, Monocrystalline Al2O3
GradePrime, Epi-Ready
Surface OrientationC-plane(0001)
Diameter50.8 mm +/- 0.1 mm
Thickness430 μm +/- 25 μm
Primary Flat OrientationA-plane(11-20) +/- 0.2°
Primary Flat Length16.0 mm +/- 1.0 mm
Pattern SpecificationDiameter: 2.4 +/- 0.2 µm;  Spacing: 0.6 +/- 0.2 µm;  Depth: 1.5 +/- 0.15 µm
Diameter: 2.7 +/- 0.1 μm;  Spacing: 0.3 +/- 0.1 μm;  Depth: 1.7 +/- 0.15 μm
Front SurfaceEpitaxial ready
Back SurfaceFine ground, Ra = 0.8 μm to 1.2 μm
Laser MarkingFront side or Back side
TTV< 10 μm
BOW< 10 μm
WARP< 10 μm
Cleaning / PackagingClass 100 cleanroom cleaning and vacuum packaging,
25 pieces in one cassette packaging or single piece packaging.

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