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3 Inch C-plane(0001) Sapphire Wafers

3 Inch C-plane(0001) Sapphire Wafers

Sapphire is an important material used widely in the growth of III-nitride epitaxial layers (GaN, AlN, InN, AlGaN, InGaN, InAlN, etc.) and electronics applications. For these applications, the surface roughness of the sapphire substrate is the key factor that influences its performance.

CRYSCORE provides the customers with high surface quality sapphire wafers at a low cost. The roughness is less than 0.2 nm (by AFM) for C-plane (0001) sapphire wafers, and less than 0.5 nm (by AFM) for custom orientations.

3 Inch C-plane(0001) Sapphire Wafers 3 Inch C-plane(0001) Sapphire Wafers
Specifications of 3 Inch C-plane(0001) Sapphire Wafers
Item3-inch C-plane(0001) 500μm Sapphire Wafers
Crystal Materials99,999%, High Purity, Monocrystalline Al2O3
GradePrime, Epi-Ready
Surface OrientationC-plane(0001)
C-plane off-angle toward M-axis 0.2 +/- 0.1°
Diameter76.2 mm +/- 0.1 mm
Thickness500 μm +/- 25 μm
Primary Flat OrientationA-plane(11-20) +/- 0.2°
Primary Flat Length22.0 mm +/- 1.0 mm
Single Side PolishedFront SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
(SSP)Back SurfaceFine ground, Ra = 0.8 μm to 1.2 μm
Double Side PolishedFront SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
(DSP)Back SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
TTV< 15 μm
BOW< 15 μm
WARP< 15 μm
Cleaning / PackagingClass 100 cleanroom cleaning and vacuum packaging,
25 pieces in one cassette packaging or single piece packaging.

Note: Custom sapphire wafers with any orientation and any thickness can be provided.

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